• High film quality and throughput
  • Stable throughput and power delivery under extreme arcing conditions
  • Reduced film, substrate, and equipment damage

Ascent® DMS Advanced Dual-Magnetron Sputtering Accessories—30 to 180 kW

The Ascent® DMS series offers unprecedented power-delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics. With selectable frequency, regulation mode, and duty cycle, as well as low stored energy and simplified, modular system configuration, the Ascent DMS accessory distinguishes itself as truly next-generation technology. Cost-effective, scalable, and versatile, it minimizes complexity, increases quality, and boosts throughput, to enable advanced process innovation.

New! The Ascent DMS MF-120 package now provides cost-effective, mid-frequency power for standard cathodes, while delivering bipolar pulsing technology benefits.

Please also see Ascent AMS DC Power Supplies.

Benefits Features
  • Increased film value: repeatable, customizable deposited films
  • Lower cost of ownership and increased productivity
  • Lower upfront costs
  • Higher power levels with reduced arc damage
  • Easy scalability, integration, and support
  • Modular and scalable (30, 40, and 60 kW units configurable up to 180 kW)
  • Selectable frequency (500 Hz to 50 kHz)
  • Power, current, or voltage regulation
  • Adjustable duty cycle—independent power ratio regulation for each magnetron
  • Unipolar and bipolar operation
  • Lowest arc energy possible from any industrial dual-magnetron sputtering supply
  • CEX (phase synchronization)
  • EU RoHS compliant