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Precision SEM E-Beam Power Supplies
The G603 60 kV lithography high voltage power supplies offer very high stability in E-beam applications.
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Features |
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Low ripple and very high stability for demanding applications
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-60 kV accelerator, 100 μA, 75 mV ripple
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Active aAccelerator temperature compensation, 5 ppm max over 10°C to 40°C
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+10 kV extractor, 400 μA, 35 mV (floating)
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-1 kV suppressor, 100 μA, 25 mV ripple (floating)
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5 V, 3 A current controlled low ripple heater (floating)
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Optional +25 kV focus, 30 μA, 100 mV (floating)
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Full digital control and monitoring using fibre isolated 29-bit CAN
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RoHS compliant to EU directive 2011/65/EU
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CE-marked for EU LV directive 2006/95/EC
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Accuracy of specifications in unlocked documents cannot be guaranteed. Please contact your AE representative to confirm specifications.
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