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2016-01-22T16:46:53-05:00 application/pdf MXE HIGH-SPEED PYROMETER Advanced Energy HIGH-SPEED MEASUREMENT FOR PRECISE CONTROL IN MOCVD AND ADVANCED SEMICONDUCTOR PROCESSES The Sekidenko MXE pyrometer combines speed and precision, enabling accurate, repeatable measurement and control of demanding MOCVD and semiconductor applications. Its high-speed performance is ideal for processes with high susceptor rotation speeds, such as HB-LED growth. For easy integration and flexible control options, the MXE unit is remarkably compact and supports a variety of I/O protocols. (c)2016 Advanced Energy Industries, Inc. All rights reserved. Adobe PDF Library 15.0 Unknown True endstream endobj 206 0 obj <>/Metadata 11 0 R/OpenAction 287 0 R/PageLayout/SinglePage/Pages 10 0 R/StructTreeRoot 13 0 R/Type/Catalog/ViewerPreferences<>>> endobj 287 0 obj <> endobj 288 0 obj <> endobj xref 0 1 0000000000 65535 f 11 1 0001019516 00000 n 206 1 0001025678 00000 n 287 2 0001025887 00000 n 0001025931 00000 n trailer <<580697544462F64C931C44AE59007B32>]/Prev 116>> startxref 1026689 %%EOF